DESIGN OF A POSITIVE RESIST FOR PROJECTION LITHOGRAPHY IN THE MID-UV Journal Article uri icon

Overview

publication date

  • January 1, 1983

Full Author List

  • WILLSON G; MILLER R; MCKEAN D; CLECAK N; TOMPKINS T; HOFER D; MICHL J; DOWNING J

Other Profiles

Additional Document Info

start page

  • 1004

end page

  • 1011

volume

  • 23

issue

  • 18