DESIGN OF A POSITIVE RESIST FOR PROJECTION LITHOGRAPHY IN THE MID-UV Journal Article uri icon

Overview

publication date

  • January 1, 1983

has restriction

  • closed

Date in CU Experts

  • December 11, 2015 11:05 AM

Full Author List

  • WILLSON G; MILLER R; MCKEAN D; CLECAK N; TOMPKINS T; HOFER D; MICHL J; DOWNING J

author count

  • 8

citation count

  • 16

Other Profiles

International Standard Serial Number (ISSN)

  • 0032-3888

Additional Document Info

start page

  • 1004

end page

  • 1011

volume

  • 23

issue

  • 18