POLYSILANES - SOLUTION PHOTOCHEMISTRY AND DEEP-UV LITHOGRAPHY Journal Article uri icon

Overview

publication date

  • January 1, 1989

Full Author List

  • MILLER RD; WALLRAFF G; CLECAK N; SOORIYAKUMARAN R; MICHL J; KARATSU T; MCKINLEY AJ; KLINGENSMITH KA; DOWNING J

Additional Document Info

start page

  • 115

end page

  • 132

volume

  • 412