POLYSILANES - PHOTOCHEMISTRY AND DEEP-UV LITHOGRAPHY Journal Article uri icon

Overview

publication date

  • July 1, 1989

Full Author List

  • MILLER RD; WALLRAFF G; CLECAK N; SOORIYAKUMARAN R; MICHL J; KARATSU T; MCKINLEY AJ; KLINGENSMITH KA; DOWNING J

Other Profiles

Additional Document Info

start page

  • 882

end page

  • 886

volume

  • 29

issue

  • 13