Fabrication of a micro cryogenic cold stage using MEMS-technology Journal Article uri icon

Overview

publication date

  • October 1, 2006

Full Author List

  • Lerou PPPM; Venhorst GCF; Berends CF; Veenstra TT; Blom M; Burger JF; ter Brake HJM; Rogalla H

Other Profiles

Additional Document Info

start page

  • 1919

end page

  • 1925

volume

  • 16

issue

  • 10