165 K microcooler operating with a sorption compressor and a micromachined cold stage Conference Proceeding uri icon


publication date

  • June 20, 2000

Full Author List

  • Burger JF; Holland HJ; Seppenwoolde JH; Berenschot E; ter Brake HJM; Gardeniers JGE; Elwenspoek M; Rogalla H

Additional Document Info

start page

  • 551

end page

  • 560