FABRICATION OF NB/AL,ALOX/AL/NB JOSEPHSON TUNNEL-JUNCTIONS USING REACTIVE ION ETCHING IN SF6 Journal Article uri icon

Overview

publication date

  • May 1, 1993

Full Author List

  • ADELERHOF DJ; BIJLSMA ME; FRANSEN PBM; WEIMAN T; FLOKSTRA J; ROGALLA H

Other Profiles

Additional Document Info

start page

  • 477

end page

  • 485

volume

  • 209

issue

  • 4