INFLUENCE OF RF PLASMA IN PLASMA CLEANING PROCESS ON PROPERTIES OF THIN SUPERCONDUCTING NB3GE FILMS Journal Article uri icon

Overview

publication date

  • January 1, 1985

Full Author List

  • KATO Y; ROGALLA H; DAVID B

Other Profiles

Additional Document Info

start page

  • 40

end page

  • 44

volume

  • 24

issue

  • 1