DC AND RF MAGNETRON SPUTTER DEPOSITION OF NBN FILMS WITH SIMULTANEOUS CONTROL OF THE NITROGEN CONSUMPTION Journal Article uri icon

Overview

publication date

  • March 15, 1988

Full Author List

  • HEDBABNY HJ; ROGALLA H

Other Profiles

Additional Document Info

start page

  • 2086

end page

  • 2090

volume

  • 63

issue

  • 6