Simple fabrication scheme for sub-10 nm electrode gaps using electron-beam lithography Journal Article uri icon

Overview

publication date

  • February 4, 2002

Full Author List

  • Liu K; Avouris P; Bucchignano J; Martel R; Sun S; Michl J

Other Profiles

Additional Document Info

start page

  • 865

end page

  • 867

volume

  • 80

issue

  • 5