Fabrication of Smooth Patterned Structures of Refractory Metals, Semiconductors, and Oxides via Template Stripping Journal Article uri icon

Overview

publication date

  • October 9, 2013

Full Author List

  • Park JH; Nagpal P; McPeak KM; Lindquist NC; Oh S-H; Norris DJ

Other Profiles

Additional Document Info

start page

  • 9701

end page

  • 9708

volume

  • 5

issue

  • 19