Surface morphology and structural observation of laser interference crystallized a-Si : H/a-SiNx : H multilayers Journal Article uri icon

Overview

publication date

  • September 22, 2000

Full Author List

  • Wang L; Li J; Huang XF; Li QL; Yin XB; Fan WB; Xu J; Li W; Li ZF; Zhu JM

Other Profiles

Additional Document Info

start page

  • 85

end page

  • 90

volume

  • 165

issue

  • 2-3