Two new planar coil designs for a high pressure radio frequency plasma source Journal Article uri icon

Overview

publication date

  • April 24, 1995

Date in CU Experts

  • February 19, 2015 3:41 AM

Full Author List

  • Munsat T; Hooke WM; Bozeman SP; Washburn S

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

start page

  • 2180

end page

  • 2182

volume

  • 66

issue

  • 17