Two new planar coil designs for a high pressure radio frequency plasma source Journal Article uri icon



  • Two planar coil designs for a high pressure rf plasma source are investigated using spectroscopic techniques and circuit analysis. In an Ar plasma a truncated version of the commonly used ‘‘spiral’’ coil is found to produce improvements in peak electron density of 20% over the full version. A coil with figure-8 geometry is found to move plasma inhomogeneities off of center and produce electron densities comparable to the spiral coils. Both of these characteristics are advantageous in industrial applications. Coil design characteristics for favorable power coupling are also determined, including the necessity of closed hydrodynamic plasma loops and the drawback of closely situated antiparallel coil currents.

publication date

  • April 24, 1995

has restriction

  • closed

Date in CU Experts

  • February 19, 2015 3:41 AM

Full Author List

  • Munsat T; Hooke WM; Bozeman SP; Washburn S

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

start page

  • 2180

end page

  • 2182


  • 66


  • 17