Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy Journal Article uri icon

Overview

publication date

  • January 29, 2004

Full Author List

  • Potma EO; Xie XS; Muntean L; Preusser J; Jones D; Ye J; Leone SR; Hinsberg WD; Schade W

Other Profiles

Additional Document Info

start page

  • 1296

end page

  • 1301

volume

  • 108

issue

  • 4