A compact, high-throughput, imaging EUV/FUV spectrometer
Conference Proceeding
Overview
publication date
- August 22, 2002
Full Author List
- Wilkinson E; Schneider NM; Steg SR; Westfall JC; Lamprecht BP; Andrews JP; Siegmund OHW; Beasley M
published in
- Proceedings of SPIE Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 479
end page
- 487
volume
- 4854