NANOMETER MOLECULAR LITHOGRAPHY Journal Article uri icon

Overview

publication date

  • March 10, 1986

Date in CU Experts

  • September 3, 2013 12:35 PM

Full Author List

  • DOUGLAS K; CLARK NA; ROTHSCHILD KJ

author count

  • 3

citation count

  • 52

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

start page

  • 676

end page

  • 678

volume

  • 48

issue

  • 10