ATOMIC LAYER DEPOSITED 1102 AS SACRIFICIAL LAYERS AND INTERNAL COATINGS FOR NANOSCALE GAPS Conference Proceeding uri icon

Overview

publication date

  • July 6, 2015

Full Author List

  • Liew L-A; Lin C-Y; Yersak A; Lewis R; Coolidge C; Lee YC

Other Profiles

International Standard Book Number (ISBN) 13

  • 978-0-7918-5690-1