Atomic layer deposition ultrathin film origami using focused ion beams Journal Article

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

December 9, 2016

Full Author List

Supekar OD; Brown JJ; Eigenfeld NT; Gertsch JC; Bright VM

published in

Nanotechnology Journal

Other Profiles

Digital Object Identifier (DOI)

10.1088/0957-4484/27/49/49LT02

Additional Document Info

volume

27

issue

49