Atomic layer deposition ultrathin film origami using focused ion beams
Journal Article
Overview
publication date
- December 9, 2016
Full Author List
- Supekar OD; Brown JJ; Eigenfeld NT; Gertsch JC; Bright VM
published in
- Nanotechnology Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 27
issue
- 49