Non-destructive acoustic metrology and void detection in 3× 50μm TSV
Conference Proceeding
Overview
publication date
- January 1, 2016
Date in CU Experts
- February 2, 2017 8:16 AM
Full Author List
- Mair R; Kotelyanskii M; Mehendale M; Ru X; Mukundhan P; Kryman T; Liebens M; Van Huylenbroeck S; Haensel L; Miller A
author count
- 12
presented at event
Additional Document Info
start page
- 54
end page
- 59