Non-destructive acoustic metrology and void detection in 3× 50μm TSV Conference Proceeding uri icon

Overview

publication date

  • January 1, 2016

Full Author List

  • Mair R; Kotelyanskii M; Mehendale M; Ru X; Mukundhan P; Kryman T; Liebens M; Van Huylenbroeck S; Haensel L; Miller A

Additional Document Info

start page

  • 54

end page

  • 59