Epitaxial growth of cubic silicon carbide on silicon using hot filament chemical vapor deposition Conference Proceeding uri icon

Overview

publication date

  • September 6, 2016

Full Author List

  • Hens P; Brow R; Robinson H; Cromar M; Van Zeghbroeck B

Other Profiles

Additional Document Info

start page

  • 48

end page

  • 52

volume

  • 635