Epitaxial growth of cubic silicon carbide on silicon using hot filament chemical vapor deposition
Conference Proceeding
Overview
publication date
- September 6, 2016
has restriction
- closed
Date in CU Experts
- July 18, 2017 4:40 AM
Full Author List
- Hens P; Brow R; Robinson H; Cromar M; Van Zeghbroeck B
author count
- 5
citation count
- 6
published in
- Thin Solid Films Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0040-6090
Digital Object Identifier (DOI)
Additional Document Info
start page
- 48
end page
- 52
volume
- 635