Effect of thermal annealing on the stiffness of an SU-8 torsional spring Conference Proceeding uri icon

Overview

publication date

  • September 9, 2012

Full Author List

  • Li Y; Kuehne S; Psychogiou D; Hierold C

Other Profiles

Additional Document Info

start page

  • 1199

end page

  • 1202

volume

  • 47