Effect of thermal annealing on the stiffness of an SU-8 torsional spring
Conference Proceeding
Overview
publication date
- September 9, 2012
Full Author List
- Li Y; Kuehne S; Psychogiou D; Hierold C
published in
- Procedia Engineering Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 1199
end page
- 1202
volume
- 47