Effect of thermal annealing on the stiffness of an SU-8 torsional spring Conference Proceeding uri icon

Overview

publication date

  • September 9, 2012

Date in CU Experts

  • October 27, 2017 2:53 AM

Full Author List

  • Li Y; Kuehne S; Psychogiou D; Hierold C

Full Editor List

  • Walczak R; Dziuban J

author count

  • 4

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 1877-7058

Additional Document Info

start page

  • 1199

end page

  • 1202

volume

  • 47