Hot Filament CVD epitaxy of 3C-SiC on 6H and 3C-SiC substrates Journal Article uri icon

Overview

publication date

  • January 1, 2017

Full Author List

  • Hens P; Brow R; Robinson H; Van Zeghbroeck B

Other Profiles

Additional Document Info

start page

  • 289

end page

  • 294

volume

  • 2

issue

  • 5