Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications Journal Article uri icon

Overview

publication date

  • March 1, 2017

Date in CU Experts

  • December 29, 2017 5:29 AM

Full Author List

  • Hennessy J; Moore CS; Balasubramanian K; Jewell AD; France K; Nikzad S

author count

  • 6