Super-Resolution Critical Dimension Limits of Positive Tone i-line Photoresists Conference Proceeding

Overview

CU Boulder Authors

McLeod, Robert R

publication date

January 28, 2018

has restriction

closed

Date in CU Experts

July 26, 2018 8:40 AM

Full Author List

Miller DB; Jones AM; McLeod RR

Full Editor List

VonFreymann G; Schoenfeld WV; Rumpf RC

author count

3

published in

Proceedings of SPIE Journal

presented at event

Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XI Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2287470

Additional Document Info

volume

10544