Atomic Layer Deposition of Aluminum Nitride and Oxynitride on Silicon Using Tris(dimethylamido)aluminum, Ammonia, and Water Journal Article uri icon

Overview

publication date

  • August 1, 2018

has restriction

  • closed

Date in CU Experts

  • November 21, 2018 9:07 AM

Full Author List

  • Abdulagatov AI; Amashaev RR; Ashurbekova KN; Ashurbekova KN; Rabadanov MK; Abdulagatov IM

author count

  • 6

citation count

  • 17

Other Profiles

International Standard Serial Number (ISSN)

  • 1070-3632

Electronic International Standard Serial Number (EISSN)

  • 1608-3350

Additional Document Info

start page

  • 1699

end page

  • 1706

volume

  • 88

issue

  • 8