SILANE FORMATION ON SILICON - REACTION-KINETICS AND SURFACE-ANALYSIS Journal Article uri icon

Overview

publication date

  • January 1, 1985

Date in CU Experts

  • September 6, 2013 11:59 AM

Full Author List

  • FRANK TC; FALCONER JL

author count

  • 2

citation count

  • 34

Other Profiles

International Standard Serial Number (ISSN)

  • 0743-7463

Additional Document Info

start page

  • 104

end page

  • 110

volume

  • 1

issue

  • 1