ELECTRON-BEAM-INDUCED DEPOSITION OF TUNGSTEN Journal Article

Overview

CU Boulder Authors

• Falconer, John L

publication date

• September 1, 1994

has restriction

• closed

Date in CU Experts

• September 6, 2013 11:59 AM

Full Author List

• BELL DA; FALCONER JL; LU ZM; MCCONICA CM

author count

• 4

citation count

• 11

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 1071-1023

Digital Object Identifier (DOI)

• https://doi.org/10.1116/1.587545

Additional Document Info

start page

• 2976

end page

• 2979

volume

• 12

issue

• 5