Magnetic field effect on the sheath thickness in plasma immersion ion implantation Journal Article uri icon

Overview

publication date

  • August 12, 2002

Full Author List

  • Keidar M; Monteiro OR; Anders A; Boyd ID

Other Profiles

Additional Document Info

start page

  • 1183

end page

  • 1185

volume

  • 81

issue

  • 7