Nanocrystalline silicon films obtained by plasma enhanced chemical vapor deposition under time-modulated-microwave-power discharge conditions Journal Article
Overview
publication date
- January 1, 2002
has restriction
- closed
Date in CU Experts
- November 14, 2019 10:24 AM
Full Author List
- Pevtsov AB; Feoktistov NA
author count
- 2
citation count
- 4
published in
Other Profiles
International Standard Serial Number (ISSN)
- 1063-7850
Digital Object Identifier (DOI)
Additional Document Info
start page
- 305
end page
- 307
volume
- 28
issue
- 4