Computer-aided design for microelectromechanical systems (MEMS) Journal Article uri icon

Overview

publication date

  • January 1, 2003

Full Author List

  • Lee YC; McCarthy B; Diao J; Zhang Z; Harsh KF

Other Profiles

Additional Document Info

start page

  • 356

end page

  • 380

volume

  • 18

issue

  • 4-6