FUZZY-LOGIC MODELS FOR THERMALLY BASED MICROELECTRONIC MANUFACTURING PROCESSES Journal Article uri icon

Overview

publication date

  • August 1, 1995

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 12:41 PM

Full Author List

  • XIE H; MAHAJAN RL; LEE YC

author count

  • 3

citation count

  • 17

Other Profiles

International Standard Serial Number (ISSN)

  • 0894-6507

Additional Document Info

start page

  • 219

end page

  • 227

volume

  • 8

issue

  • 3