FUZZY-LOGIC MODELS FOR THERMALLY BASED MICROELECTRONIC MANUFACTURING PROCESSES Journal Article uri icon

Overview

publication date

  • August 1, 1995

Full Author List

  • XIE H; MAHAJAN RL; LEE YC

Other Profiles

Additional Document Info

start page

  • 219

end page

  • 227

volume

  • 8

issue

  • 3