Modeling of thermal actuation in a bulk-micromachined CMOS micromirror Journal Article uri icon

Overview

publication date

  • September 1, 2000

Full Author List

  • Liew LA; Tuantranont A; Bright VM

Other Profiles

Additional Document Info

start page

  • 791

end page

  • 801

volume

  • 31

issue

  • 9-10