Ultra-thin film encapsulation processes for micro-electro-mechanical devices and systems Journal Article uri icon

Overview

publication date

  • May 7, 2006

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Stoldt CR; Bright VM

author count

  • 2

citation count

  • 25

Other Profiles

International Standard Serial Number (ISSN)

  • 0022-3727

Electronic International Standard Serial Number (EISSN)

  • 1361-6463

Additional Document Info

start page

  • R163

end page

  • R170

volume

  • 39

issue

  • 9