Galvanic corrosion induced degredation of tensile properties in micromachined polycrystalline silicon
Journal Article
Overview
publication date
- May 7, 2007
Full Author List
- Miller DC; Boyce BL; Gall K; Stoldt CR
published in
- Applied Physics Letters Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 90
issue
- 19