Galvanic corrosion induced degredation of tensile properties in micromachined polycrystalline silicon Journal Article

Overview

CU Boulder Authors

Stoldt, Conrad Robert

publication date

May 7, 2007

Full Author List

Miller DC; Boyce BL; Gall K; Stoldt CR

published in

Applied Physics Letters Journal

Other Profiles

Digital Object Identifier (DOI)

10.1063/1.2737370

Additional Document Info

volume

90

issue

19