Connections between morphological and mechanical evolution during galvanic corrosion of micromachined polycrystalline and monocrystalline silicon Journal Article uri icon

Overview

publication date

  • June 15, 2008

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Miller DC; Boyce BL; Kotula PG; Stoldt CR

author count

  • 4

citation count

  • 13

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-8979

Electronic International Standard Serial Number (EISSN)

  • 1089-7550

Additional Document Info

volume

  • 103

issue

  • 12

number

  • ARTN 123518