Connections between morphological and mechanical evolution during galvanic corrosion of micromachined polycrystalline and monocrystalline silicon
Journal Article
Overview
publication date
- June 15, 2008
Full Author List
- Miller DC; Boyce BL; Kotula PG; Stoldt CR
published in
- Journal of Applied Physics Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 103
issue
- 12