Connections between morphological and mechanical evolution during galvanic corrosion of micromachined polycrystalline and monocrystalline silicon Journal Article uri icon

Overview

publication date

  • June 15, 2008

Full Author List

  • Miller DC; Boyce BL; Kotula PG; Stoldt CR

Other Profiles

Additional Document Info

volume

  • 103

issue

  • 12