Relation Between Morphology, Etch Rate, Surface Wetting, and Electrochemical Characteristics for Micromachined Silicon Subject to Galvanic Corrosion Journal Article uri icon

Overview

publication date

  • January 1, 2008

Full Author List

  • Miller DC; Becker CR; Stoldt CR

Other Profiles

Additional Document Info

start page

  • F253

end page

  • F265

volume

  • 155

issue

  • 12