Galvanic corrosion of miniaturized polysilicon structures morphological, electrical, and mechanical effects Journal Article

Overview

CU Boulder Authors

Stoldt, Conrad Robert

publication date

January 1, 2005

Full Author List

Miller DC; Gall K; Stoldt CR

published in

Electrochemical and Solid-State Letters Journal

Other Profiles

Digital Object Identifier (DOI)

10.1149/1.1960009

Additional Document Info

start page

G223

end page

G226

volume

8

issue

9