Galvanic corrosion of miniaturized polysilicon structures morphological, electrical, and mechanical effects Journal Article uri icon

Overview

publication date

  • January 1, 2005

Full Author List

  • Miller DC; Gall K; Stoldt CR

Other Profiles

Additional Document Info

start page

  • G223

end page

  • G226

volume

  • 8

issue

  • 9