Galvanic corrosion of miniaturized polysilicon structures morphological, electrical, and mechanical effects
Journal Article
Overview
publication date
- January 1, 2005
Full Author List
- Miller DC; Gall K; Stoldt CR
published in
- ECS Electrochemistry Letters Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- G223
end page
- G226
volume
- 8
issue
- 9