Galvanic corrosion of miniaturized polysilicon structures morphological, electrical, and mechanical effects Journal Article uri icon

Overview

publication date

  • January 1, 2005

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Miller DC; Gall K; Stoldt CR

author count

  • 3

citation count

  • 16

Other Profiles

International Standard Serial Number (ISSN)

  • 1099-0062

Electronic International Standard Serial Number (EISSN)

  • 1944-8775

Additional Document Info

start page

  • G223

end page

  • G226

volume

  • 8

issue

  • 9