Mechanisms of collision-assisted etching of silicon. Conference Proceeding

Overview

CU Boulder Authors

• Minton, Timothy K.

publication date

• August 20, 2000

Date in CU Experts

• October 25, 2020 12:34 PM

Full Author List

• Zhang JM; Minton TK

author count

• 2

published in

• ACS National Meeting Book of Abstracts  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0065-7727

Additional Document Info

start page

• U206

end page

• U206

volume

• 220