Gas-surface dynamics and profile evolution during etching of silicon Journal Article uri icon

Overview

publication date

  • September 30, 1996

has restriction

  • green

Date in CU Experts

  • October 25, 2020 12:34 PM

Full Author List

  • Hwang GS; Anderson CM; Gordon MJ; Moore TA; Minton TK; Giapis KP

author count

  • 6

citation count

  • 68

Other Profiles

International Standard Serial Number (ISSN)

  • 0031-9007

Additional Document Info

start page

  • 3049

end page

  • 3052

volume

  • 77

issue

  • 14