Inelastic and reactive scattering during etching of silicon with hyperthermal fluorine atoms Conference Proceeding uri icon

Overview

publication date

  • August 25, 1996

Date in CU Experts

  • October 25, 2020 12:34 PM

Full Author List

  • Minton TK

author count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

start page

  • 219

end page

  • PHYS

volume

  • 212