Structural comparisons of SiOx and Si/SiOx formed by the exposure of silicon (100) to molecular oxygen and to hyperthermal atomic oxygen Journal Article uri icon

Overview

publication date

  • January 15, 2005

has restriction

  • closed

Date in CU Experts

  • October 25, 2020 12:34 PM

Full Author List

  • Kisa M; Minton TK; Yang JC

author count

  • 3

citation count

  • 20

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-8979

Electronic International Standard Serial Number (EISSN)

  • 1089-7550

Additional Document Info

volume

  • 97

issue

  • 2

number

  • ARTN 023520