Oxidation and Etching of CVD Diamond by Thermal and Hyperthermal Atomic Oxygen Journal Article uri icon

Overview

publication date

  • November 11, 2010

Full Author List

  • Shpilman Z; Gouzman I; Grossman E; Shen L; Minton TK; Paci JT; Schatz GC; Akhvlediani R; Hoffmann A

Other Profiles

Additional Document Info

start page

  • 18996

end page

  • 19003

volume

  • 114

issue

  • 44