Porous low-k dielectrics: Material properties Conference Proceeding uri icon

Overview

publication date

  • August 18, 2002

Full Author List

  • Tyberg C; Huang E; Hedrick J; Simonyi E; Gates S; Cohen S; Malone K; Wickland H; Sankarapandian M; Toney M

Additional Document Info

start page

  • 161

end page

  • 172

volume

  • 874