Mitigating residual stress in Cu metallization Journal Article

Overview

CU Boulder Authors

• Toney, Michael Folsom

publication date

• December 3, 2012

has restriction

• closed

Date in CU Experts

• November 5, 2020 2:39 AM

Full Author List

• Murray CE; Jordan-Sweet J; Ryan ET; Toney MF

author count

• 4

citation count

• 4

published in

• Applied Physics Letters  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0003-6951

Digital Object Identifier (DOI)

• https://doi.org/10.1063/1.4769366

Additional Document Info

volume

• 101

issue

• 23

number

• ARTN 231906