In situ evolution of stress gradients in Cu films induced by capping layers Journal Article
Overview
publication date
- June 28, 2010
has restriction
- closed
Date in CU Experts
- November 5, 2020 2:39 AM
Full Author List
- Murray CE; Besser PR; Witt C; Toney M
author count
- 4
citation count
- 4
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0003-6951
Digital Object Identifier (DOI)
Additional Document Info
volume
- 96
issue
- 26
number
- ARTN 261903