Engineering epitaxial gamma-Al2O3 gate dielectric films on 4H-SiC Journal Article uri icon

Overview

publication date

  • November 15, 2007

Full Author List

  • Tanner CM; Toney MF; Lu J; Blom H-O; Sawkar-Mathur M; Tafesse MA; Chang JP

Other Profiles

Additional Document Info

volume

  • 102

issue

  • 10