Engineering epitaxial gamma-Al2O3 gate dielectric films on 4H-SiC
Journal Article
Overview
publication date
- November 15, 2007
Full Author List
- Tanner CM; Toney MF; Lu J; Blom H-O; Sawkar-Mathur M; Tafesse MA; Chang JP
published in
- Journal of Applied Physics Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 102
issue
- 10