Low-dielectric, nanoporous organosilicate films prepared via inorganic/organic polymer hybrid templates
Journal Article
Overview
publication date
- November 1, 1999
Full Author List
- Nguyen CV; Carter KR; Hawker CJ; Hedrick JL; Jaffe RL; Miller RD; Remenar JF; Rhee HW; Rice PM; Toney MF
published in
- Chemistry of Materials Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 3080
end page
- 3085
volume
- 11
issue
- 11