Low-dielectric, nanoporous organosilicate films prepared via inorganic/organic polymer hybrid templates Journal Article

Overview

CU Boulder Authors

Toney, Michael Folsom

publication date

November 1, 1999

Full Author List

Nguyen CV; Carter KR; Hawker CJ; Hedrick JL; Jaffe RL; Miller RD; Remenar JF; Rhee HW; Rice PM; Toney MF

published in

Chemistry of Materials Journal

Other Profiles

Digital Object Identifier (DOI)

10.1021/cm990114d

Additional Document Info

start page

3080

end page

3085

volume

11

issue

11