Low-dielectric, nanoporous organosilicate films prepared via inorganic/organic polymer hybrid templates Journal Article uri icon

Overview

publication date

  • November 1, 1999

Full Author List

  • Nguyen CV; Carter KR; Hawker CJ; Hedrick JL; Jaffe RL; Miller RD; Remenar JF; Rhee HW; Rice PM; Toney MF

Other Profiles

Additional Document Info

start page

  • 3080

end page

  • 3085

volume

  • 11

issue

  • 11