Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics Journal Article uri icon

Overview

publication date

  • November 1, 2004

Full Author List

  • Lubguban JA; Gangopadhyay S; Lahlouh B; Rajagopalan T; Biswas N; Sun J; Huang DH; Simon SL; Mallikarjunan A; Kim HC

Other Profiles

Additional Document Info

start page

  • 3224

end page

  • 3233

volume

  • 19

issue

  • 11