Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films Journal Article uri icon


publication date

  • June 16, 2003

Full Author List

  • Rajagopalan T; Lahlouh B; Lubguban JA; Biswas N; Gangopadhyay S; Sun J; Huang DH; Simon SL; Mallikarjunan A; Kim HC

Other Profiles

Additional Document Info

start page

  • 4328

end page

  • 4330


  • 82


  • 24