Hydrocarbon detection via ion implantation in metal-insulator-semiconductor devices Journal Article uri icon

Overview

publication date

  • November 29, 2004

Full Author List

  • Medlin JW; Bastasz R; McDaniel AH

Other Profiles

Additional Document Info

start page

  • 5457

end page

  • 5459

volume

  • 85

issue

  • 22