In situ measurement of annealing-induced line shape evolution in nanoimprinted polymers using scatterometry Conference Proceeding uri icon

Overview

publication date

  • February 24, 2009

Date in CU Experts

  • December 31, 2020 9:00 AM

Full Author List

  • Patrick HJ; Germer TA; Ding Y; Ro HW; Richter LJ; Soles CL

Full Editor List

  • Schellenberg FM; LaFontaine BM

author count

  • 6

citation count

  • 8

Other Profiles

International Standard Serial Number (ISSN)

  • 0277-786X

Additional Document Info

volume

  • 7271