In situ measurement of annealing-induced line shape evolution in nanoimprinted polymers using scatterometry Conference Proceeding uri icon

Overview

publication date

  • February 24, 2009

Full Author List

  • Patrick HJ; Germer TA; Ding Y; Ro HW; Richter LJ; Soles CL

Other Profiles

Additional Document Info

volume

  • 7271