In situ measurement of annealing-induced line shape evolution in nanoimprinted polymers using scatterometry
Conference Proceeding
Overview
publication date
Date in CU Experts
-
December 31, 2020 9:00 AM
Full Author List
-
Patrick HJ; Germer TA; Ding Y; Ro HW; Richter LJ; Soles CL
Full Editor List
-
Schellenberg FM; LaFontaine BM
author count
citation count
published in
presented at event
Other Profiles
International Standard Serial Number (ISSN)
Digital Object Identifier (DOI)
Additional Document Info
volume