In situ measurement of annealing-induced line shape evolution in nanoimprinted polymers using scatterometry
Conference Proceeding
Overview
publication date
- February 24, 2009
Full Author List
- Patrick HJ; Germer TA; Ding Y; Ro HW; Richter LJ; Soles CL
published in
- Proceedings of SPIE Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
volume
- 7271